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Smart digital micro-capacitor based on doped nanocrystalline silicon with HFO2 high K insulator
Published 2016
Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems, 1046 - 1049
A digital variable capacitor has been designed and fabricated based on multi-cantilevers of doped nanocrystalline silicon with variable lengths, suspended over a bottom electrode on top of a high-k material, HfO2, to increase the tuning range of the capacitance. By applying a voltage between the electrodes, the electrostatic force pulls the beams in one-by-one, realizing a digital increase in capacitance. These devices were fabricated using a 4-mask process, and electrical tests confirmed the stepwise increase of the capacitance with voltage from the multi-cantilever digital capacitors.