Abstract
Obstructive sleep apnea syndrome (OSAS) has received much attention in recent years due to its significant harm to human health and high morbidity rate. A respiration monitoring system is needed to detect OSAS, so that the patient can receive treatment in a timely manner. Wired and wireless OSAS monitoring systems have been developed, but they require a wire connection and batteries to operate, and they are bulky, heavy and not user-friendly. In this paper, we propose the use of a flexible surface acoustic wave (SAW) micro sensor to detect and monitor OSAS by measuring the humidity change associated with the respiration of a person. SAW sensors on rigid 128° YX LiNbO3 substrate are also characterized for this application. Results show both types of SAW sensors are suitable for OSAS monitoring with good sensitivity, repeatability and reliability, and the response time and recovery time for the flexible SAW sensors are 1.125 and 0.75 s, respectively. Our work demonstrates the potential for an innovative flexible micro sensor for the detection and monitoring of OSAS.