Abstract
Because of large surface-to-volume ratios and low restoring forces, surface stiction and friction can dominate the performance of Micro-Electro-Mechanical Systems (MEMS) currently being developed. To achieve the functionality and reliability of these devices, tribologists strive to understand the mechanisms of adhesion, friction and wear over a broad range of length scales. This paper presents the design and commission of a simple tribological test rig for the characterisation of MEMS materials from micro-scale to meso-scale. The effects of normal load, environment and various coatings on the friction and wear are explored using this rig.