Abstract
Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate (PET) substrates at a low temperature of 120 ℃. Dual resonance modes, namely, the zero order pseudo asymmetric (A0) and symmetric (S0) Lamb wave modes, have been obtained from the SAW devices. The SAW devices are very flexible and durable, and perform well even after being bent with a large strain of 2500 με up to 100 times, demonstrated its suitability for the application in flexible electronics. The SAW devices were also found highly sensitive to compressive and tensile forces, exhibiting excellent anti-strain deterioration property, thus they are particularly suitable for the application in sensing large strains.