ZnO films for surface acoustic wave microfluidic devices

W. I. Milne; X. Y. Du; Y. Q. Fu; S. C. Tan; J. K. Luo; S. Pisana; S. Maeng; S. H. Kim; Y. J. Choi; D. S. Lee; N. M. Park; J. Park; A. C. Ferrari; A. J. Flewitt; ITE

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ZnO films for surface acoustic wave microfluidic devices

W. I. Milne, X. Y. Du, Y. Q. Fu, S. C. Tan, J. K. Luo, S. Pisana, S. Maeng, S. H. Kim, Y. J. Choi, D. S. Lee, …

IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, p.1365

2007

Abstract

Engineering, Electrical & Electronic

Imaging Science & Photographic Technology

Science & Technology

Engineering

Optics

Physical Sciences

Technology

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

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Title: ZnO films for surface acoustic wave microfluidic devices
Creators - without role: W. I. Milne - University of Cambridge
X. Y. Du - University of Cambridge
Y. Q. Fu - University of Cambridge
S. C. Tan - University of Cambridge
J. K. Luo - University of Cambridge
S. Pisana - University of Cambridge
S. Maeng - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
S. H. Kim - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
Y. J. Choi - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
D. S. Lee - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
N. M. Park - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
J. Park - Elect & Telecommun Res Inst, Daejeon 305700, South Korea
A. C. Ferrari - University of Cambridge
A. J. Flewitt - University of Cambridge
ITE
Publication Details: IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, p.1365
Publisher: Inst Image Information & Television Engineers
Number of pages: 3
Grant note: 2005-S605-02 / IT R&D program of MIC/IITA
Identifiers: 9911931608841
Academic Unit: Institute for Materials Research and Innovation
Language: English
Resource Type: Conference proceeding

ZnO films for surface acoustic wave microfluidic devices

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