Abstract
This paper describes a MEMS (micro-electromechanical systems) modulator suitable for optical system network signaling. Several actuator mechanisms exist that potentially satisfied this purpose, electrostatic actuation was identified as the most suitable for the application due to speed of operation and low power consumption. MEMS geometry and analytical mode models were developed and applications performance estimated including multiphysics phenomena. Finite element analysis was undertaken using the commercially available software suite, COMSOL (R), performing static and dynamic simulations and analyses in the time and frequency domains. The proposal is that the MEMS modulator would be integrated with other optical components encased in a hermetically sealed vacuum environment, resulting in a lightly damped response with decaying oscillation. A two-step drive signal was developed and simulated using the multidomain, simulation package SIMULINK (R). The optimized MEMS design and two-step driver realized a MEMS optical modulator meeting the required specification. Finally a proposal for integration within an optical transmitter assembly is described.