Diamond and diamond-like carbon MEMS

Conference proceeding

Peer reviewed

J. K Luo, Y. Q FU, H. R LE, J. A Williams, S. M Spearing and W. I Mime

Journal of micromechanics and microengineering (Print), Vol.17(7), pp.S147-S163

01/07/2007

Abstract

Applied sciences

Electronics

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Mechanical engineering. Machine design

Mechanical instruments, equipment and techniques

Microelectronic fabrication (materials and surfaces technology)

Micromechanical devices and systems

Physics

Precision engineering, watch making

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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197 Times Cited - Scopus

Title: Diamond and diamond-like carbon MEMS
Creators - without role: J. K Luo - University of Greater Manchester
Y. Q FU - University of Cambridge
H. R LE - University of Dundee
J. A Williams - University of Cambridge
S. M Spearing - University of Southampton
W. I Mime - University of Cambridge
Publication Details: Journal of micromechanics and microengineering (Print), Vol.17(7), pp.S147-S163
Publisher: Institute of Physics
Identifiers: 9911919708841; 0960-1317; 1361-6439; 1361-6439
Academic Unit: Institute for Materials Research and Innovation
Language: English
Resource Type: Conference proceeding